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HOME > 제품소개ComponentsRF ION SOURCE > OIS-One

OIS-One

Application

OIS-One 관련 이미지

Optorun OIS-One RF ion sources are developed for high-rateion-assisted deposition and substrate ion cleaning, which areinstalled in Optorun OTFC-1100 and OTFC-1300 coaters formass production of various optical filters.

FEATURES

  • Filamentless design. Low contamination and long life.
  • High and uniform current beams with broad beam angle.
  • Stable, long-hour operation.

Specifications

Specifications of OIS - One
Dimensions φ300mm×150mm(H)
Grids φ 17cm three molybdenum grids
Beam voltage 100V~1500V
Max beam current 1000mA(max)
Acc voltage 100V~1000V
Max RF power 600W(max)
Gas flow rate 20sccm~50sccm(argon)
40sccm~100sccm(oxygen)
Pressure 5×10-2Pa
Water-cooling RF coil and beam unit
Neutralizer
Dimensions φ6cm×8cm
Max emission current 1500mA(max)
Max RF power 150W(max)
Gas flow rate 5sccm~10sccm(argon only)

OIS-One 관련 이미지

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