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HOME > 제품소개Thin Film CoatersOTFC SeriesGeneral Optical Thin Film Coater > OTFC-1300

OTFC-1300

Standard Specifications

OTFC-1300

Model OTFC-1300CBI/DBI
Vacuum Chamber SUS304,φ1300mm×1610mm(H)
Substrate Dome Size φ1130mm
Substrate Dome Rotation Speed 10rpm to 50rpm(Variable)
Optical Film Thickness Control System HOM2-R-VIS350A High-precision Optical Monitor Wavelength range: 350nm to 1100nm Reflection/Transmittance
Crystal Film Thickness Monitor XTC/3 plus 6-point rotary sensor
Evaporation Source EB source: 2 units
Ion Source 17cm RF Ion Source
Vacuum System Roughing Pump, 2 Diffusion Pumps + PolycoldOr 2 Cryo Pumps + Super Trap
Performance
Ultimate Pressure 7.0 × 10-5Pa or lower
Pump Down Rate 30 min (Atm. to 1.3 × 10-3Pa)
Substrate Heater 350℃ (max.)
Utility
Layout Dimensions 5000mm (W) × 6500mm (D) × 3500mm (H) approx.
Power Requirements 3-phase, 200V, 50/60Hz, 104kVA approx.
Cooling Water Flow Rate 140 /min. or greater
Compressed Air Pressure 0.5MPa or greater
Gross Weight 9000kg approx.

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