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HOME > 제품소개Thin Film CoatersOTFC SeriesGeneral Optical Thin Film Coater > OTFC-1100

OTFC-1100

Standard Specifications

OTFC-1100

Model OTFC-1100CBI/DBI
Vacuum Chamber SUS304,φ1100mm×1520mm(H)
Substrate Dome Size φ950mm
Substrate Dome Rotation Speed 10rpm to 50rpm(Variable)
10rpm to 50rpm(Variable) HOM2-R-VIS350AHigh-precision Optical Monitor Wavelength range::350nm to 1100nm Reflection/Transmittance
Crystal Film Thickness Monitor XTC/3+6point rotary sensor
Evaporation Source EB source: 2 units
Ion Source 17cm RF Ion Source
Vacuum System Roughing Pump, 2 Diffusion Pumps + Polycold Or 2 Cryo Pumps + Super Trap
Performance
Ultimate Pressure 7.0 × 10-5Pa or lower
Pump Down Rate 30 min (Atm. to 1.3 × 10-3Pa)
Substrate Heater 350℃ (max.)
Utility
Layout Dimensions 約5000mm(W)×6000mm(D)×3300mm(H)
Power Requirements 3-phase, 200V, 50/60Hz, 100kVA approx.
Cooling Water Flow Rate 120 /min or greater
Compressed Air Pressure 0.5MPa or greater
Gross Weight 8500kg approx.

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