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제품소개

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HOME > 제품소개 > R&D Machine

R&D Machine

제품사양

WET STATION

WET STATION
Machine Dimension W2200 X L1500 X H1900
Chemical Bath Quartz, 4t , Leak safety barrel : pvc, ptfe ,Chemical supply : Diaphragm pump ,Heating system : Quartz heater PID temp control
QDR Rinse Bath Over flow type DI shower, N2 bubbling
Transfer Arm 2 Cassette clamp type(50ea wafer)
Process Fluid acid
Process Temperature Max. 40℃ ~ 120℃
Substrate motion Auto Load / Unload Type
System Control Full Auto

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